TY  - CHAP
A1  - Myneni, S 
A1  - Hess, D W
T1  - Fluorocarbon film and residue removal using supercrital CO2 mixtures.
Y1  - 2002//
N1  - R829554
SP  - 180
EP  - 189
PB  -  The Electrochemical Scoiety
ER  -